Thermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography - Université Paris-Est-Créteil-Val-de-Marne
Journal Articles Quantitative InfraRed Thermography Journal Year : 2013

Thermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography

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Physics [physics]

Olivier RIOU  : Connect in order to contact the contributor

https://hal.u-pec.fr/hal-04134648

Submitted on : Tuesday, June 20, 2023-3:30:53 PM

Last modification on : Wednesday, June 21, 2023-3:24:04 AM

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hal-04134648 , version 1 (20-06-2023)

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Olivier Riou, Pierre-Olivier Logerais, Vincent Froger, Jean-Félix Durastanti, Anne Bouteville. Thermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography. Quantitative InfraRed Thermography Journal, 2013, 10 (2), pp.159-171. ⟨10.1080/17686733.2013.793468⟩. ⟨hal-04134648⟩

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